Concepedia

Dan Towery

DT

2

Publications

195

Citations

2

H-Index

1998

Active since

Affiliations

Massachusetts Institute of Technology(Current)

Dan Towery is an author at Massachusetts Institute of Technology specializing in mechanical engineering, engineering, and surface polishing.

Top concepts

EngineeringMaterial ScienceSurface PolishingMechanical EngineeringCorrosionPolymer ScienceSurface ScienceMicroelectronicsPolymer ChemistryMaterial Processing

Publications per year

1998–1998

2

Publications

2

The physical and electrical effects of metal-fill patterning practices for oxide chemical-mechanical polishing processes

B.E. Stine, Duane S. Boning, J.E. Chung et al. · IEEE Transactions on Electron Devices · 1998 · 159 citations

Engineering, Mechanical Engineering, Chemical Engineering +21

Chemical mechanical polishing of polymer films

Dan Towery, Michael A. Fury · Journal of Electronic Materials · 1998 · 36 citations

Materials Science, Engineering, Polymer Technology +7

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