Publication | Closed Access
The removal of deformed submicron particles from silicon wafers by spin rinse and megasonics
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Citations
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References
2000
Year
Materials ScienceSilicon WafersEngineeringWafer Scale ProcessingPhysicsMicrofabricationApplied PhysicsParticle TechnologySemiconductor Device FabricationMicroelectronicsDeformed Submicron ParticlesSpin Rinse
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