Concepedia

P. Wrschka

PW

5

Publications

361

Citations

5

H-Index

1999

Active since

Affiliations

Albany State University(Current)

University at Albany, State University of New York

Philips (United States)

P. Wrschka is an author at Albany State University specializing in chemical engineering, corrosion, and engineering.

Top concepts

CorrosionEngineeringSurface ScienceMaterial ScienceChemical EngineeringMicrostructureMaterials EngineeringSurface PolishingMineral ProcessingMaterial Processing

Publications per year

1999–2001

5

Publications

5

Surface Chemistry Studies of Copper Chemical Mechanical Planarization

J. M. Hernandez, P. Wrschka, G. S. Oehrlein · Journal of The Electrochemical Society · 2001 · 188 citations

Engineering, Chemistry, Electrometallurgy +19

Chemical Mechanical Planarization of Copper Damascene Structures

P. Wrschka, J. M. Hernandez, G. S. Oehrlein et al. · Journal of The Electrochemical Society · 2000 · 76 citations

Engineering, Severe Plastic Deformation, Mechanical Engineering +18

Polishing Parameter Dependencies and Surface Oxidation of Chemical Mechanical Polishing of Al Thin Films

P. Wrschka, J. M. Hernandez, Y. Y. Hsu et al. · Journal of The Electrochemical Society · 1999 · 42 citations

Engineering, Polyurethane Pad, Oxidation Resistance +19

Chemical Mechanical Polishing of Al and SiO2 Thin Films: The Role of Consumables

J. M. Hernandez, P. Wrschka, Y. Y. Hsu et al. · Journal of The Electrochemical Society · 1999 · 28 citations

Engineering, Mechanical Engineering, Mineral Processing +21

Development of a Slurry Employing a Unique Silica Abrasive for the CMP of Cu Damascene Structures

P. Wrschka, J. M. Hernandez, G. S. Oehrlein et al. · Journal of The Electrochemical Society · 2001 · 27 citations

Engineering, Nonmetallic Mineral Deposit, Unique Silica Abrasive +19

Rows per page

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