P. Wrschka - Concepedia

Author

P. Wrschka

Also Known As

P. Wrschka, Peter Wrschka

Publications

361

Citations

H-Index

Concepts

All Affiliations

P. Wrschka is an author at Albany State University specializing in chemical engineering, corrosion, and engineering.

#	Concept	H-Index	Publications	Citations
1	Engineering	5	5	361
2	Chemical Engineering	5	5	361
3	Materials Engineering	4	4	285
4	Chemistry	1	1	188
5	Environmental Engineering	1	1	27

P. Wrschka

Publications

361

Citations

H-Index

Page 1

	Year	Citations
Surface Chemistry Studies of Copper Chemical Mechanical Planarization J. M. Hernandez, P. Wrschka, G. S. Oehrlein Journal of The Electrochemical Society EngineeringChemistryElectrometallurgyChemical EngineeringCorrosion	2001	188
Chemical Mechanical Planarization of Copper Damascene Structures P. Wrschka, J. M. Hernandez, G. S. Oehrlein, Journal of The Electrochemical Society EngineeringSevere Plastic DeformationMechanical EngineeringChemical EngineeringMaterial Processing	2000	76
Polishing Parameter Dependencies and Surface Oxidation of Chemical Mechanical Polishing of Al Thin Films P. Wrschka, J. M. Hernandez, Y. Y. Hsu, Journal of The Electrochemical Society EngineeringPolyurethane PadOxidation ResistanceMechanical EngineeringAlumina Particles	1999	42
Chemical Mechanical Polishing of Al and SiO2 Thin Films: The Role of Consumables J. M. Hernandez, P. Wrschka, Y. Y. Hsu, Journal of The Electrochemical Society EngineeringMechanical EngineeringMineral ProcessingAbrasive ProcessChemical Engineering	1999	28
Development of a Slurry Employing a Unique Silica Abrasive for the CMP of Cu Damascene Structures P. Wrschka, J. M. Hernandez, G. S. Oehrlein, Journal of The Electrochemical Society EngineeringNonmetallic Mineral DepositUnique Silica AbrasiveCu Damascene StructuresChemical Deposition	2001	27

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