Concepedia

Ian McMackin

IM

10

Publications

208

Citations

10

H-Index

2002

Active since

Affiliations

The University of Texas at Austin(Current)

Ian McMackin is an author at The University of Texas at Austin specializing in engineering, applied physics, and microfabrication.

Top concepts

EngineeringApplied PhysicsMicrofabrication3D PrintingMaterial ScienceNanolithographyMicroelectronicsTechnologyNanofabricationElectronic Packaging

Publications per year

2002–2014

10

Publications

10

Step and Repeat UV nanoimprint lithography tools and processes

Ian McMackin, Jin Choi, Philip Schumaker et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 55 citations

Materials Science, Molecular Imprints, Engineering +14

Defect reduction progress in step and flash imprint lithography

K. Selenidis, John G. Maltabes, Ian McMackin et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 32 citations

Engineering, Electron-beam Lithography, Integrated Circuits +19

Development of imprint materials for the Step and Flash Imprint Lithography process

Frank Xu, Nicholas A. Stacey, M. Watts et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 30 citations

High resolution defect inspection of step and flash imprint lithography for 32 nm half-pitch patterning

Ian McMackin, Joseph Perez, Kosta Selinidis et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 15 citations

Patterned wafer defect density analysis of step and flash imprint lithography

Ian McMackin, W. E. Martin, Joseph Perez et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2008 · 14 citations

Electrical Engineering, Wafer Scale Processing, Engineering +13

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