Jin Choi

Step and Repeat UV nanoimprint lithography tools and processes

Ian McMackin, Jin Choi, Philip Schumaker et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 55 citations

Engineering, Materials Engineering, Materials Science +15

Distortion and overlay performance of UV step and repeat imprint lithography

Jin Choi, Kevin J. Nordquist, Ashuman Cherala et al. · Microelectronic Engineering · 2005 · 38 citations

Engineering, Manufacturing Engineering, Materials Engineering +14

Development of imprint materials for the Step and Flash Imprint Lithography process

Frank Xu, Nicholas A. Stacey, M. Watts et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 30 citations

Engineering, Materials Engineering, Materials Science +16

Status of curvilinear data format working group

Jin Choi, Soo Ryu, Sukho Lee et al. · 2022 · 24 citations

Computing, Computer Engineering, Computer Science +7

Study on various curvilinear data representations and their impact on mask and wafer manufacturing

Jin Choi, Soo Ryu, Sukho Lee et al. · Journal of Micro/Nanopatterning Materials and Metrology · 2021 · 22 citations · Full text

Engineering, Manufacturing Engineering, Computer-aided Design +11