Concepedia
Author
Ashuman Cherala
Also Known As
1
Publications
38
Citations
H-Index
2
Concepts
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Distortion and overlay performance of UV step and repeat imprint lithography
Jin Choi, Kevin J. Nordquist, Ashuman Cherala, +5
Microelectronic Engineering
Electron-beam LithographyBeam LithographyMicrofabricationRepeat Imprint LithographyUv Step +3
2005
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