Concepedia

Publication | Closed Access

Distortion and overlay performance of UV step and repeat imprint lithography

DOI

38

Citations

7

References

2005

Year

Jin Choi, Kevin J. Nordquist, Ashuman Cherala, Lester Casoose, K. A. Gehoski, William J. Dauksher, S. V. Sreenivasan, Douglas J. Resnick
Microelectronic Engineering

References

YearCitations

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