Distortion and overlay performance of UV step and repeat imprint lithography

Sub-10 nm imprint lithography and applications

Stephen Y. Chou, Peter R. Krauss, Wei Zhang et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 1.1K citations

Engineering, Electrical Engineering, Materials Science +14

Step and flash imprint lithography: a new approach to high-resolution patterning

Matthew Colburn, Stephen C. Johnson, M. D. Stewart et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1999 · 564 citations

Engineering, Materials Engineering, Materials Science +16

Fabrication of nanostructures using a UV-based imprint technique

Markus Bender, Martin Otto, B. Hadam et al. · Microelectronic Engineering · 2000 · 123 citations

Engineering, Materials Engineering, Materials Science +11

Characterization of 8-in. wafers printed by nanoimprint lithography

C. Perret · Microelectronic Engineering · 2004 · 43 citations

Engineering, Materials Engineering, Materials Science +12

Characterization of 8-in. wafers printed by nanoimprint lithography

C. Perret · Microelectronic Engineering · 2004 · 30 citations

Engineering, Materials Engineering, Materials Science +12