Concepedia

Joseph Perez

JP

4

Publications

86

Citations

4

H-Index

2007

Active since

Affiliations

The University of Texas at Austin(Current)

Joseph Perez is an author at The University of Texas at Austin specializing in electronic packaging, microelectronics, and microfabrication.

Top concepts

3D PrintingEngineeringApplied PhysicsMicroelectronicsMicrofabricationElectronic PackagingTechnologyNanofabricationNanolithographyMaterial Science

Publications per year

2007–2008

4

Publications

4

Defect reduction progress in step and flash imprint lithography

K. Selenidis, John G. Maltabes, Ian McMackin et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 32 citations

Engineering, Electron-beam Lithography, Integrated Circuits +19

32 nm imprint masks using variable shape beam pattern generators

Kosta Selinidis, Ecron Thompson, Gerard M. Schmid et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 25 citations

High resolution defect inspection of step and flash imprint lithography for 32 nm half-pitch patterning

Ian McMackin, Joseph Perez, Kosta Selinidis et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 15 citations

Patterned wafer defect density analysis of step and flash imprint lithography

Ian McMackin, W. E. Martin, Joseph Perez et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2008 · 14 citations

Electrical Engineering, Wafer Scale Processing, Engineering +13

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