Concepedia

Kosta Selinidis

KS

Statistics

Publications

8

Citations

141

H-Index

8

Active since

2000

Affiliations

The University of Texas at Austin(Current)

Kosta Selinidis is an author at The University of Texas at Austin specializing in imprint lithography, semiconductor devices, and engineering.

Publications per year

2000–2014

8

Publications

8

Progress in mask replication using jet and flash imprint lithography

Kosta Selinidis, Cynthia B. Brooks, Gary Doyle et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 33 citations

Engineering, Materials Engineering, Materials Science +17

32 nm imprint masks using variable shape beam pattern generators

Kosta Selinidis, Ecron Thompson, Gerard M. Schmid et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 25 citations

Engineering, Manufacturing Engineering, Materials Science +15

High resolution defect inspection of step and flash imprint lithography for 32 nm half-pitch patterning

Ian McMackin, Joseph Perez, Kosta Selinidis et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 16 citations

Engineering, Manufacturing Engineering, Digital Fabrication +13

Mask replication using jet and flash imprint lithography

Kosta Selinidis · Journal of Micro/Nanolithography MEMS and MOEMS · 2011 · 16 citations

Engineering, Manufacturing Engineering, Materials Science +17

In situ control and monitoring of doped and compositionally graded SiGe films using spectroscopic ellipsometry and second harmonic generation

L. Mantese, Kosta Selinidis, P.T. Wilson et al. · Applied Surface Science · 2000 · 15 citations

Natural Sciences, Materials Engineering, Materials Science +17

1–5 of 8