Publication | Closed Access
In situ control and monitoring of doped and compositionally graded SiGe films using spectroscopic ellipsometry and second harmonic generation
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Citations
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References
2000
Year
Materials ScienceIi-vi SemiconductorEngineeringPhysicsOptical PropertiesSurface ScienceApplied PhysicsSitu ControlSige FilmsSecond Harmonic GenerationSiliceneSilicon On InsulatorOptoelectronicsThin Film Processing
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