Statistics
Publications
4
Citations
256
H-Index
4
Active since
2017
Affiliations
SUNY Polytechnic Institute(Current)
T. Hakamata is an author at SUNY Polytechnic Institute specializing in materials science, semiconductor devices, and contact scaling.
Publications per year
2017–2020
4
4
Perspective: New process technologies required for future devices and scaling
Robert D. Clark, Kandabara Tapily, K.H. Yu et al. · APL Materials · 2018 · 192 citations · Full text
Sonal Dey, Kai-Hung Yu, Steven Consiglio et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2017 · 22 citations · Full text
Natural Sciences, Materials Engineering, Materials Science +17
1–4 of 4