Concepedia
Statistics
Publications
2
Citations
64
H-Index
Active since
2016
Affiliations
IMEC(Current)
KU Leuven
S-A. Chew is an author at IMEC specializing in materials engineering, applied physics, and engineering.
Top concepts
EngineeringApplied PhysicsNanoelectronicsMaterial ScienceMicroelectronicsMaterials EngineeringElectrical EngineeringPhysicsSurface ScienceMicrofabrication
Publications per year
2016–2017
Ultralow-resistivity CMOS contact scheme with pre-contact amorphization plus Ti (germano-)silicidation
Hao Yu, Marc Schaekers, Andriy Hikavyy et al. · 2016 · 34 citations
Materials Engineering, Materials Science, Electrical Engineering +15
Ultralow resistive wrap around contact to scaled FinFET devices by using ALD-Ti contact metal
S-A. Chew, Hao Yu, Marc Schaekers et al. · 2017 · 30 citations
Engineering, Ald-ti Contact Metal, Nanoelectronics +17
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