Mary Breton

A Novel Dry Selective Etch of SiGe for the Enablement of High Performance Logic Stacked Gate-All-Around NanoSheet Devices

N. Loubet, Subhadeep Kal, Cheryl Alix et al. · 2019 · 87 citations

Engineering, Electrical Engineering, Materials Science +16

EUV patterning successes and frontiers

Nelson Felix, Dan Corliss, Karen Petrillo et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 25 citations

Engineering, Electrical Engineering, Materials Science +15

Review of nanosheet metrology opportunities for technology readiness

Mary Breton, Daniel Schmidt, Andrew Greene et al. · Journal of Micro/Nanopatterning Materials and Metrology · 2022 · 23 citations · Full text

Engineering, Electrical Engineering, Manufacturing Engineering +17

A direct fusion drive for rocket propulsion

Yosef S. Razin, Gary Pajer, Mary Breton et al. · Acta Astronautica · 2014 · 22 citations · Full text

Engineering, Aerospace Engineering, Nuclear Engineering +13

Electrical test prediction using hybrid metrology and machine learning

John G. Gaudiello, Susan Emans, Michael Shifrin et al. · 2017 · 17 citations

Engineering, Electrical Engineering, Manufacturing Engineering +17