Concepedia

Author

P. Schiavone

Commissariat à l'Énergie Atomique et aux Énergies Alternatives

Also Known As

Berton, K., P. Schiavone, Patrick Schiavone, Schiavone, P.

46

Publications

83

Citations

4

H-Index

26

Concepts

All Affiliations

Commissariat à l'Énergie Atomique et aux Énergies AlternativesLaboratoire des Technologies de la MicroélectroniqueCEA GrenobleCentre National de la Recherche Scientifique
PS

About

P. Schiavone is an author at Commissariat à l'Énergie Atomique et aux Énergies Alternatives specializing in engineering, measurement, and numerical simulation.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

3

3

62

2

Education

2

2

36

3

Applied Physics

2

2

52

4

Industrial Engineering

1

1

10

5

Materials Science

1

1

26

P. Schiavone

×

3

Publications

62

Citations

3

H-Index

YearCitations

Rigorous electromagnetic simulation of EUV masks: influence of the absorber properties

P. Schiavone, Gérard Granet, J. Y. Robic

Microelectronic Engineering

2001

26

Measurement of residual thickness using scatterometry

D. Fuard, Corinne Perret, Vincent Farys,

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

2005

26

Resist trimming etch process control using dynamic scatterometry

Mohamed El Kodadi, S. Soulan, M. Besacier,

Microelectronic Engineering

2008

10

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