S. Soulan - Concepedia

Author

S. Soulan

Also Known As

Nicolas, A., S. Soulan, SOULAN, Sébastien, Sebastien Soulan, Soulan, S., Soulan, Sebastien, Soulan, Sébastien, Sébastien Soulan

Publications

Citations

H-Index

Concepts

All Affiliations

S. Soulan is an author at Laboratoire des Technologies de la Microélectronique specializing in instrumentation, measurement, and engineering.

#	Concept	H-Index	Publications	Citations
1	Education	2	2	21
2	Engineering	2	2	21
3	Applied Physics	1	1	11
4	Industrial Engineering	1	1	10
5	Physics	1	1	11

S. Soulan

Publications

Citations

H-Index

Page 1

	Year	Citations
Real time scatterometry for profile control during resist trimming process Mohamed El Kodadi, S. Soulan, M. Besacier, Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena EngineeringReal Time ScatterometryPhysicsMeasurementCalibration	2009	11
Resist trimming etch process control using dynamic scatterometry Mohamed El Kodadi, S. Soulan, M. Besacier, Microelectronic Engineering Conventional InstrumentationEngineeringMeasurementIndustrial EngineeringNumerical Simulation	2008	10

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