Concepedia

S. Soulan

SS

2

Publications

21

Citations

2

H-Index

2008

Active since

Affiliations

Laboratoire des Technologies de la Microélectronique(Current)

S. Soulan is an author at Laboratoire des Technologies de la Microélectronique specializing in instrumentation, measurement, and engineering.

Top concepts

Publications per year

2008–2009

2

Publications

2

Real time scatterometry for profile control during resist trimming process

Mohamed El Kodadi, S. Soulan, M. Besacier et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2009 · 11 citations · Full text

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Resist trimming etch process control using dynamic scatterometry

Mohamed El Kodadi, S. Soulan, M. Besacier et al. · Microelectronic Engineering · 2008 · 10 citations · Full text

, , +10

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