Concepedia

M. Besacier

MB

10

Publications

133

Citations

10

H-Index

2002

Active since

Affiliations

Centre National de la Recherche Scientifique(Current)

Laboratoire des Technologies de la Microélectronique

Commissariat à l'Énergie Atomique et aux Énergies Alternatives

Université Grenoble Alpes

STMicroelectronics (France)

M. Besacier is an author at Centre National de la Recherche Scientifique specializing in engineering, applied physics, and numerical simulation.

Top concepts

Publications per year

2002–2022

10

Publications

10

Assessment of different simplified resist models

D. Fuard, M. Besacier, Patrick Schiavone · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 19 citations

, , +19

Advanced OPC Mask-3D and Resist-3D modeling

A. Szücs, Jonathan Planchot, Vincent Farys et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 16 citations

, , +24

Scatterometric porosimetry: A new characterization technique for porous material patterned structures

R. Bouyssou, Mohamed El Kodadi, Christophe Licitra et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2010 · 15 citations

, , +15

Simulation of extreme ultraviolet masks with defective multilayers

Peter Evanschitzky, Andreas Erdmann, M. Besacier et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 14 citations

, , +15

Shadowing effect minimization in EUV mask by modeling

M. Besacier, Patrick Schiavone · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 14 citations

, , +13

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