Statistics
Publications
11
Citations
820
H-Index
10
Active since
2001
D. Fuard is an author at Centre National de la Recherche Scientifique specializing in natural sciences, materials engineering, and materials science.
Publications per year
2001–2020
11
11
High density plasma etching of low k dielectric polymers in oxygen-based chemistries
D. Fuard, O. Joubert, L. Vallier et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 33 citations
Natural Sciences, Materials Engineering, Materials Science +17
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