Publication | Open Access
Resist trimming etch process control using dynamic scatterometry
10
Citations
6
References
2008
Year
Conventional InstrumentationEngineeringMeasurementIndustrial EngineeringNumerical SimulationProcess ControlEducationSystems EngineeringComputer-aided DesignInstrumentationPlasma EtchingDynamic ScatterometryProcess Measurement
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