J. Y. Robic - Concepedia

Author

J. Y. Robic

Commissariat à l'Énergie Atomique et aux Énergies Alternatives

Also Known As

J. Y. Robic, J.-Y. Robic, J.Y. Robic, Jean Yves Robic, Robic, J.y

Publications

421

Citations

H-Index

Concepts

All Affiliations

Commissariat à l'Énergie Atomique et aux Énergies Alternatives CEA Grenoble Laboratoire d'Électronique des Technologies de l'Information Centre National de la Recherche Scientifique Institut polytechnique de Grenoble

About

J. Y. Robic is an author at Commissariat à l'Énergie Atomique et aux Énergies Alternatives specializing in engineering, applied physics, and materials science.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	10	10	391
2	Applied Physics	10	10	391
3	Materials Science	8	8	351
4	Materials Engineering	2	2	33
5	Chemical Engineering	1	1	67

J. Y. Robic

Publications

404

Citations

H-Index

Page 1

	Year	Citations
Residual stresses in evaporated silicon dioxide thin films: Correlation with deposition parameters and aging behavior Hervé Leplan, Bernard Geenen, J. Y. Robic, Journal of Applied Physics Materials ScienceEngineeringDeposition ParametersSurface ScienceApplied Physics	1995	108
Infrared ellipsometry study of evaporated SiO2 films: Matrix densification, porosity, water sorption A. Brunet‐Bruneau, J. Rivory, B. Rafin, Journal of Applied Physics Optical MaterialsEngineeringNanoporous MaterialMatrix DensificationOptoelectronic Devices	1997	67
Kinetics of residual stress evolution in evaporated silicon dioxide films exposed to room air Hervé Leplan, J. Y. Robic, Y. Pauleau Journal of Applied Physics Materials ScienceEngineeringResidual Stress EvolutionElectron Gun EvaporationSurface Science	1996	62
Residual stress in silicon dioxide thin films produced by ion-assisted deposition J. Y. Robic, Hervé Leplan, Y. Pauleau, Thin Solid Films Materials ScienceEngineeringIon-assisted DepositionApplied PhysicsResidual Stress	1996	34
Characterization of magnesium fluoride thin films deposited by direct electron beam evaporation L. Dumas, Etienne Quesnel, J. Y. Robic, Journal of Vacuum Science & Technology A Vacuum Surfaces and Films Materials ScienceEngineeringSurface ScienceApplied PhysicsMass Density	2000	34
Rigorous electromagnetic simulation of EUV masks: influence of the absorber properties P. Schiavone, Gérard Granet, J. Y. Robic Microelectronic Engineering EngineeringPhysicsAbsorber PropertiesApplied PhysicsNumerical Simulation	2001	26
Ion implantation in semiconductors and other materials G. Guernet, M. Bruel, J. P. Gailliard, Materials ScienceSemiconductorsMaterials EngineeringIon ImplantationEngineering	1977	22
Characterization of optics and masks for the EUV lithography V. Paret, Pierre Boher, Roland Geyl, Microelectronic Engineering EngineeringElectron-beam LithographyBeam LithographyMicrofabricationOptical Properties	2002	14
Characterization of magnesium fluoride thin films produced by argon ion beam-assisted deposition L. Dumas, Etienne Quesnel, J. Y. Robic, Thin Solid Films Materials ScienceEngineeringSurface ScienceApplied PhysicsMagnesium-based Composite	2001	13
Phase-shift mask for EUV lithography C. Constancias, M. Richard, D. Joyeux, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE	2006	13

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