Joseph J. Bendik

Run-to-Run Critical Dimension and Sidewall Angle Lithography Control Using the PROLITH Simulator

Chadi El Chemali, J.S. Freudenberg, Matt Hankinson et al. · IEEE Transactions on Semiconductor Manufacturing · 2004 · 26 citations

Prolith Simulator, Physical Design (Electronics), Engineering +12

Modeling the effects of excimer laser bandwidths on lithographic performance

Armen Kroyan, Joseph J. Bendik, Olivier Semprez et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2000 · 23 citations

Short Wavelength Optic, Optical Materials, Engineering +17

Equivalent Gyrator Networks with Nullators and Norators

Joseph J. Bendik · IEEE Transactions on Circuit Theory · 1967 · 18 citations

Linear System, Equivalent Gyrator Networks, Mathematical Modelling +1

Defining a physically accurate laser bandwidth input for optical proximity correction (OPC) and modeling

Ivan Lalovic, Oleg Kritsun, Sarah McGowan et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 11 citations

Optical Materials, Engineering, Optical Transmission System +19

Modeling and performance metrics for longitudinal chromatic aberrations, focus-drilling, and Z-noise: exploring excimer laser pulse-spectra

Mark D. Smith, Joseph J. Bendik, Ivan Lalovic et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 10 citations