Statistics
Publications
3
Citations
38
H-Index
3
Active since
2007
Affiliations
Oleg Kritsun is an author at Advanced Micro Devices (United States) specializing in engineering, optical properties, and instrumentation.
Publications per year
2007–2008
3
3
Lithography process control using scatterometry metrology and semi-physical modeling
Kevin Lensing, Jason P. Cain, Amogh Prabhu et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 14 citations
Lithography Process Model, Engineering, Electron-beam Lithography +19
Evaluating diffraction based overlay metrology for double patterning technologies
Chandra Saru Saravanan, Yongdong Liu, Prasad Dasari et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 13 citations
Optical Materials, Engineering, Electron-beam Lithography +19
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