Ivan Lalovic

Characterization of line-edge roughness in photoresist using an image fading technique

Adam R. Pawloski, Alden Acheta, Ivan Lalovic et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 57 citations

Impact of finite laser bandwidth on the critical dimension of L/S structures

Ivan Lalovic · Journal of Micro/Nanolithography MEMS and MOEMS · 2008 · 20 citations

Engineering, Laser Science, Optic Design +24

Behavior of lens aberrations as a function of wavelength on KrF and ArF lithography scanners

Mark A. Terry, Ivan Lalovic, Gregory M. Wells et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 16 citations

Operating Laser Wavelength, Engineering, Microscopy +19

Effects of 95% integral vs. FWHM bandwidth specifications on lithographic imaging

Armen Kroyan, Ivan Lalovic, Nigel R. Farrar · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 14 citations

Engineering, Laser Spectrum, Fwhm Bandwidth Specifications +21

Laser bandwidth effect on overlay budget and imaging for the 45 nm and 32nm technology nodes with immersion lithography

Umberto Iessi, Michiel Kupers, Elio De Chiara et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 14 citations

Optical Materials, Engineering, Electron-beam Lithography +24