Concepedia
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Publications
1
Citations
14
H-Index
Active since
2010
Michiel Kupers is an author specializing in optical tolerancing, computer engineering, and ophthalmology.
Top concepts
PhotonicsEngineeringOphthalmologyApplied PhysicsOptical SystemsOptoelectronicsMicroelectronicsOptical MaterialsLaser ApplicationsOptical Properties
Publications per year
2010–2010
Laser bandwidth effect on overlay budget and imaging for the 45 nm and 32nm technology nodes with immersion lithography
Umberto Iessi, Michiel Kupers, Elio De Chiara et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 14 citations
Optical Materials, Engineering, Electron-beam Lithography +24
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