Concepedia

Elio De Chiara

ED

Statistics

Publications

2

Citations

24

H-Index

2

Active since

2008

Affiliations

STMicroelectronics (Italy)(Current)

Elio De Chiara is an author at STMicroelectronics (Italy) specializing in ophthalmology, computer engineering, and microelectronics.

Top concepts

Publications per year

2008–2010

2

Publications

2

Laser bandwidth effect on overlay budget and imaging for the 45 nm and 32nm technology nodes with immersion lithography

Umberto Iessi, Michiel Kupers, Elio De Chiara et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 14 citations

, , +24

Double patterning overlay and CD budget for 32 nm technology node

Umberto Iessi, Sara Loi, A. Salerno et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 10 citations

, , +20

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