Concepedia

Jason P. Cain

JP

Statistics

Publications

15

Citations

526

H-Index

12

Active since

2002

Affiliations

University of California, Berkeley(Current)

Advanced Micro Devices (United States)

Lawrence Berkeley National Laboratory

University at Albany, State University of New York

Cadence Design Systems (United States)

Jason P. Cain is an author at University of California, Berkeley specializing in engineering, manufacturing engineering, and microfabrication.

Publications per year

2002–2016

15

Publications

15

Modeling Within-Die Spatial Correlation Effects for Process-Design Co-Optimization

Paul Friedberg, Yu Cao, Jason P. Cain et al. · 2005 · 231 citations

, , +17

Decomposition strategies for self-aligned double patterning

Yuansheng Ma, Jason Sweis, Chris Bencher et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 41 citations

, , +12

Extreme ultraviolet microexposures at the Advanced Light Source using the 0.3 numerical aperture micro-exposure tool optic

Patrick Naulleau, Kenneth A. Goldberg, Erik Anderson et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 36 citations

, , +10

Electrical linewidth metrology for systematic CD variation characterization and causal analysis

Jason P. Cain, Costas J. Spanos · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 33 citations

, , +17

Experimental and model-based study of the robustness of line-edge roughness metric extraction in the presence of noise

Patrick Naulleau, Jason P. Cain · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2007 · 28 citations · Full text

, , +14

1–5 of 15