Jason P. Cain

Modeling Within-Die Spatial Correlation Effects for Process-Design Co-Optimization

Paul Friedberg, Yu Cao, Jason P. Cain et al. · 2005 · 231 citations

Engineering, Computer Engineering, Electrical Engineering +17

Decomposition strategies for self-aligned double patterning

Yuansheng Ma, Jason Sweis, Chris Bencher et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 41 citations

Engineering, Computer Science, Manufacturing Engineering +12

Extreme ultraviolet microexposures at the Advanced Light Source using the 0.3 numerical aperture micro-exposure tool optic

Patrick Naulleau, Kenneth A. Goldberg, Erik Anderson et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 36 citations

Engineering, Manufacturing Engineering, Materials Engineering +10

Electrical linewidth metrology for systematic CD variation characterization and causal analysis

Jason P. Cain, Costas J. Spanos · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 33 citations

Engineering, Electrical Engineering, Manufacturing Engineering +17

Experimental and model-based study of the robustness of line-edge roughness metric extraction in the presence of noise

Patrick Naulleau, Jason P. Cain · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2007 · 28 citations · Full text

Engineering, Computer Science, Spatial Analysis +14