Statistics
Publications
1
Citations
13
H-Index
1
Active since
2008
Affiliations
Chandra Saru Saravanan is an author at Advanced Micro Devices (United States) specializing in form measurement, scatterometry, and surface metrology.
Publications per year
2008–2008
1
1
Evaluating diffraction based overlay metrology for double patterning technologies
Chandra Saru Saravanan, Yongdong Liu, Prasad Dasari et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 13 citations
Engineering, Materials Science, Materials Characterization +14
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