Sarah McGowan

Statistics

Publications

Citations

127

H-Index

Active since

2005

Affiliations

Advanced Micro Devices (United States)(Current)

Advanced Micro Devices (Canada)

Sarah McGowan is an author at Advanced Micro Devices (United States) specializing in engineering, electrical engineering, and manufacturing engineering.

Publications per year

2005–2014

Publications

The use of EUV lithography to produce demonstration devices

Bruno LaFontaine, Yunfei Deng, Ryoung-Han Kim et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 42 citations

Engineering, Electrical Engineering, Manufacturing Engineering +15

Line-edge roughness in 193-nm resists: lithographic aspects and etch transfer

Thomas I. Wallow, Alden Acheta, Yuansheng Ma et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 28 citations

Engineering, Electrical Engineering, Digital Imaging +16

A Novel Approach for the Patterning and High-Volume Production of Sub-40-nm Gates

Karen Romero, Ralf Stephan, M. Mazur et al. · IEEE Transactions on Semiconductor Manufacturing · 2005 · 20 citations

Engineering, Electrical Engineering, Materials Science +15

Process window enhancement using advanced RET techniques for 20nm contact layer

Ping Yang, Sarah McGowan, Ying Gong et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 15 citations

Engineering, Computer Engineering, Manufacturing Engineering +13

Process Window and Device Variations Evaluation using Array-Based Characterization Circuits

Cyrus Tabery, M. Craig, G. Burbach et al. · 2006 · 11 citations

Engineering, Manufacturing Engineering, Design Automation +13

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