Concepedia

Olivier Semprez

OS

Statistics

Publications

2

Citations

38

H-Index

2

Active since

2000

Olivier Semprez is an author specializing in applied physics, optoelectronics, and engineering.

Top concepts

Publications per year

2000–2012

2

Publications

2

Modeling the effects of excimer laser bandwidths on lithographic performance

Armen Kroyan, Joseph J. Bendik, Olivier Semprez et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2000 · 23 citations

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Laser-produced plasma versus laser-assisted discharge plasma: physics and technology of extreme ultraviolet lithography light sources

Guido Schriever, Olivier Semprez, Jeroen Jonkers et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2012 · 15 citations

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