Daniel Ritter

Field-induced index profiles of multimode ion-exchanged strip waveguides

H.-J. Lilienhof, E. Voges, Daniel Ritter et al. · IEEE Journal of Quantum Electronics · 1982 · 86 citations

Natural Sciences, Electrical Engineering, Materials Science +13

Extreme ultraviolet lithography at IMEC: Shadowing compensation and flare mitigation strategy

Gian F. Lorusso, A. M. Goethals, R. Jonckheere et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2007 · 30 citations

Engineering, Manufacturing Engineering, Design Automation +10

Third dimension of proximity effect correction (PEC)

Nezih Ünal, D. Mahalu, Olga Raslin et al. · Microelectronic Engineering · 2009 · 20 citations

Medicine, Social Psychology, Spatial Analysis +5

Index profiles of multimode optical strip waveguides by field-enhanced ion exchange in glasses

H.-J. Lilienhof, Klaus Heidemann, Daniel Ritter et al. · Optics Communications · 1980 · 18 citations

Natural Sciences, Materials Engineering, Materials Science +16

Bend the curve – Shape optimization in laser grayscale direct write lithography using a single figure of merit

Jan Erjawetz, Dominique Collé, Gerda Ekindorf et al. · Micro and Nano Engineering · 2022 · 16 citations · Full text

Architecture, Manufacturing Engineering, Dose-response Modeling +12