24:T50f,Background: Charging of insulators is a complex phenomenon to simulate since the accuracy of the simulations is very sensitive to the interaction of electrons with matter and electric fields. Aim: In this study, we report model improvements for a previously developed Monte-Carlo simulator to more accurately simulate samples that charge. Approach: The improvements include both modeling of low energy electron scattering by first-principle approaches and charging of insulators by the redistribution of the charge carriers in the material with an electron beam-induced conductivity and a dielectric breakdown model. Results: The first-principle scattering models provide a more realistic charge distribution cloud in the material and a better match between noncharging simulations and experimental results. The improvements on the charging models, which mainly focus on the redistribution of the charge carriers, lead to a smoother distribution of the charges and better experimental agreement of charging simulations. Conclusions: Combined with a more accurate tracing of low energy electrons in the electric field, we managed to reproduce the dynamically changing charging contrast due to an induced positive surface potential.25:T422,Laser-based pattern generators are versatile tools for transferring design layouts into resist structures. The non-linear response and the proximity effects caused by the interaction of the laser beam with the low-contrast photoresist are particularly critical for the creation of shapes with sloped, stepped and continuous topographies. Cross-sections were taken to compare topological differences of the measurement results with the graytone design. For simple shapes, an iterative adjustment of the global dose distribution is sufficient, while for more complex shapes the local correction of dose values using mathematical models is preferred. For the one-step exposure of the corrected map, it requires the careful assessment of a contrast curve and knowledge of various parameters. The coefficient of determination R2 as a unitless single figure of merit proved useful in the quantitative comparison of the two methods, and demonstrated the capability of current model-based approaches for shape optimization towards the target design within one cycle.

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