78
Publications
854
Citations
5
Authors
Taufkirchen
Germany
GenISys (Germany) is a company institution in Taufkirchen, Germany known for engineering, applied physics, and materials science.
78
Charge-induced pattern displacement in E-beam lithography
Kerim T. Arat, Thomas Klimpel, A.C. Zonnevylle et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2019 · 22 citations · Full text
Engineering, Electron-beam Lithography, Electron Diffraction +18
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| Publications | Citations | H-Index | |
|---|---|---|---|
NÜ GenISys (Germany) | 20 | 105 | 6 |
DR GenISys (Germany) | 8 | 176 | 6 |
NT GenISys (Germany) | 7 | 37 | 4 |
GE GenISys (Germany) | 4 | 20 | 2 |
CK GenISys (Germany) | 1 | 39 | 1 |
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