Concepedia

Nezih Ünal

NÜ

4

Publications

62

Citations

4

H-Index

2009

Active since

Affiliations

GenISys (Germany)(Current)

Fraunhofer Institute for Integrated Systems and Device Technology

Schott (Germany)

SUSS MicroTec (Germany)

Vorarlberg University of Applied Sciences

Nezih Ünal is an author at GenISys (Germany) specializing in microfabrication, engineering, and computational geometry.

Top concepts

EngineeringMicrofabricationEducation3D PrintingMeasurementInstrumentationMicroelectronicsNatural SciencesGeometry ModelingComputer Engineering

Publications per year

2009–2012

4

Publications

4

Third dimension of proximity effect correction (PEC)

Nezih Ünal, D. Mahalu, Olga Raslin et al. · Microelectronic Engineering · 2009 · 20 citations

Geometric Modeling, Precision Measurement, Proximity Effect Correction +6

Improved CD control and line edge roughness in E-beam lithography through combining proximity effect correction with gray scale techniques

Jens Bolten, T. Wahlbrink, Namil Koo et al. · Microelectronic Engineering · 2009 · 19 citations

Engineering, Proximity Effect Correction, Electron-beam Lithography +6

Mask aligner lithography simulation – From lithography simulation to process validation

Kristian Motzek, Stefan Partel, Arianna Bramati et al. · Microelectronic Engineering · 2012 · 13 citations

Engineering, Electron-beam Lithography, Beam Lithography +6

Optimization of illumination pupils and mask structures for proximity printing

Kristian Motzek, A. Bich, Andreas Erdmann et al. · Microelectronic Engineering · 2009 · 10 citations

3D Printing, Printed Electronics, Proximity Printing +1

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