Concepedia

Jan Erjawetz

JE

Statistics

Publications

2

Citations

25

H-Index

2

Active since

2021

Affiliations

Paul Scherrer Institute(Current)

Jan Erjawetz is an author at Paul Scherrer Institute specializing in microfabrication, geometric modeling, and mechanical engineering.

Top concepts

Publications per year

2021–2022

2

Publications

2

Bend the curve – Shape optimization in laser grayscale direct write lithography using a single figure of merit

Jan Erjawetz, Dominique Collé, Gerda Ekindorf et al. · Micro and Nano Engineering · 2022 · 15 citations · Full text

, , +14

Hybrid structures by direct write lithography—Tuning the contrast and surface topography of grayscale photoresist with nanoimprint

Sijia Xie, Jan Erjawetz, Christine Schuster et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2021 · 10 citations · Full text

Rows per page

1–2 of 2