Statistics
Publications
13
Citations
227
H-Index
12
Active since
2007
Tuan Vo is an author at IBM (United States) specializing in engineering, electrical engineering, and applied physics.
Publications per year
2007–2023
13
13
CVD Co and its application to Cu damascene interconnections
T. Nogami, J. Maniscalco, Anita Madan et al. · 2010 · 43 citations
Pooja Batra, Spyridon Skordas, D. LaTulipe et al. · Journal of Low Power Electronics and Applications · 2014 · 19 citations · Full text
Engineering, Integrated Circuits, Interconnect (Integrated Circuits) +16
High reliability 32 nm Cu/ULK BEOL based on PVD CuMn seed, and its extendibility
T. Nogami, T. Bolom, A. Simon et al. · 2010 · 17 citations
Engineering, Nm Beol, Interconnect (Integrated Circuits) +16
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