Concepedia

Y. C. Ku

YC

Statistics

Publications

3

Citations

58

H-Index

3

Active since

2011

Affiliations

Taiwan Semiconductor Manufacturing Company (Taiwan)(Current)

ASML (Netherlands)

Y. C. Ku is an author at Taiwan Semiconductor Manufacturing Company (Taiwan) specializing in engineering, metrology, and semiconductor metrology.

Publications per year

2011–2014

3

Publications

3

On-product overlay enhancement using advanced litho-cluster control based on integrated metrology, ultra-small DBO targets and novel corrections

Kaustuve Bhattacharyya, Chih-Ming Ke, Guo-Tsai Huang et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 26 citations

Engineering, Electrical Engineering, Metrology +11

Improving on-product performance at litho using integrated diffraction-based metrology and computationally designed device-like targets fit for advanced technologies (incl. FinFET)

Kai-Hsiung Chen, G. T. Huang, KS Chen et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 21 citations

Engineering, Electrical Engineering, Materials Science +15

Litho process control via optimum metrology sampling while providing cycle time reduction and faster metrology-to-litho turn around time

K.-H. Chen, Jacky Huang, Wencheng Yang et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 11 citations

Engineering, Manufacturing Engineering, Instrumentation +11

1–3 of 3