Concepedia

K.-H. Chen

KC

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Publications

1

Citations

11

H-Index

1

Active since

2011

Affiliations

ASML (Netherlands)(Current)

K.-H. Chen is an author at ASML (Netherlands) specializing in industrial inspection, systems engineering, and instrumentation.

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Publications per year

2011–2011

1

Publications

1

Litho process control via optimum metrology sampling while providing cycle time reduction and faster metrology-to-litho turn around time

K.-H. Chen, Jacky Huang, Wencheng Yang et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 11 citations

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