Author
Tero S. Kulmala
Also Known As
Jan Doise, Kulmala, TS, T. Kulmala, T. S. Kulmala, T.S. Kulmala, Tero Kulmala, Tero S. Kulmala
29
Publications
5.1K
Citations
11
H-Index
41
Concepts
All Affiliations
| # | Concept | H-Index | Publications | Citations |
|---|---|---|---|---|
1 | Engineering | 8 | 8 | 1.3K |
2 | Applied Physics | 7 | 7 | 1.3K |
3 | Natural Sciences | 1 | 1 | 57 |
4 | Chemistry | 1 | 1 | 57 |
5 | Computer Engineering | 1 | 1 | 13 |
Tero S. Kulmala
×
11
Publications
4.9K
Citations
10
H-Index
| Year | Citations | |
|---|---|---|
2011 | 3.5K | |
2012 | 1.2K | |
2013 | 132 | |
2015 | 57 | |
2009 | 51 | |
2016 | 41 | |
2008 | 13 | |
2011 | 13 | |
2018 | 13 | |
Toward 10nm half-pitch in EUV lithography: results on resist screening and pattern collapse mitigation techniques Tero S. Kulmala, Michaela Vockenhuber, Elizabeth Buitrago, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE EngineeringElectron-beam LithographyEuv LithographyIntegrated CircuitsAggressive Scaling | 2015 | 11 |
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