Yebo Zhu

Surface corrosion inhibition mechanism of sarcosine as a green novel inhibitor on a novel barrier layer material of cobalt in copper film CMP for GLSI

Yinchan Zhang, Xinhuan Niu, Jiakai Zhou et al. · Materials Science in Semiconductor Processing · 2021 · 50 citations

Materials Engineering, Materials Science, Corrosion Protection +10

Effect and mechanism of oxidant on alkaline chemical mechanical polishing of gallium nitride thin films

Yebo Zhu, Xinhuan Niu, Ziyang Hou et al. · Materials Science in Semiconductor Processing · 2021 · 45 citations

Materials Science, Chemical Engineering, Engineering +9

Effect and mechanism analysis of sarcosine on the chemical mechanical polishing performance of copper film for GLSI

Yinchan Zhang, Xinhuan Niu, Jiakai Zhou et al. · Materials Science in Semiconductor Processing · 2022 · 21 citations

Materials Science, Materials Engineering, Chemical Engineering +10

Synergistic effect of 1,2,4-triazole and phytic acid as inhibitors on copper film CMP for ruthenium - based copper interconnected and the surface action mechanism analysis

Fu Luo, Xinhuan Niu, Han Yan et al. · Materials Science in Semiconductor Processing · 2022 · 21 citations

Inorganic Chemistry, Chemical Engineering, Synergistic Effect +9

Prediction of planarization property in copper film chemical mechanical polishing via response surface methodology and convolutional neural network

Jiakai Zhou, Xinhuan Niu, Tianlin Zhang et al. · Nano Select · 2021 · 13 citations · Full text

Search Optimization, Convolutional Neural Network, Engineering +18