Concepedia

Surface corrosion inhibition mechanism of sarcosine as a green novel inhibitor on a novel barrier layer material of cobalt in copper film CMP for GLSI

Yinchan Zhang, Xinhuan Niu, Jiakai Zhou, Jianchao Wang, Chenghui Yang, Ziyang Hou, Yebo Zhu, Li Huang

Materials Science in Semiconductor Processing · 2021 · 50 citations · 44 references

DOI

Concepts

References

44

Chemical mechanical planarization for microelectronics applications

Parshuram B. Zantye, Ashok Kumar, A. K. Sikder · Materials Science and Engineering R Reports · 2004 · 600 citations

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Compilation of PZC and IEP of sparingly soluble metal oxides and hydroxides from literature

Marek Kosmulski · Advances in Colloid and Interface Science · 2009 · 443 citations

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Chromium-based regulations and greening in metal finishing industries in the USA

Anil Baral, Robert Engelken · Environmental Science & Policy · 2002 · 350 citations

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Environment friendly chemical mechanical polishing of copper

Zhenyu Zhang, Junfeng Cui, Jiabo Zhang et al. · Applied Surface Science · 2018 · 300 citations

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Chemistry of corrosion inhibitors

James M. Gaidis · Cement and Concrete Composites · 2003 · 266 citations

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