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Synergistic effect of 1,2,4-triazole and phytic acid as inhibitors on copper film CMP for ruthenium - based copper interconnected and the surface action mechanism analysis

Inorganic ChemistryChemical EngineeringSynergistic EffectEngineeringSurface ChemistryBioactive MetalSurface ScienceCatalysisCopper Film CmpChemistrySurface ReactivityPhytic Acid