Publication | Closed Access
Effect and mechanism of oxidant on alkaline chemical mechanical polishing of gallium nitride thin films
45
Citations
27
References
2021
Year
Materials ScienceChemical EngineeringEngineeringMaterial ProcessingCorrosionSurface ScienceApplied PhysicsGallium OxideSurface TreatmentThin FilmsSurface ProcessingAnodizing
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