Publication | Closed Access
Effect and mechanism analysis of sarcosine on the chemical mechanical polishing performance of copper film for GLSI
21
Citations
54
References
2022
Year
Materials ScienceMaterials EngineeringChemical EngineeringEngineeringMaterial ProcessingCorrosionCopper FilmMechanical EngineeringMechanism AnalysisSurface TreatmentSurface PolishingSurface ProcessingMetal Processing
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