Saravanapriyan Sriraman

Overview of atomic layer etching in the semiconductor industry

Keren J. Kanarik, Thorsten Lill, Eric A. Hudson et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2015 · 576 citations · Full text

Engineering, Layer Deposition, Integrated Circuits +17

Mechanism of hydrogen-induced crystallization of amorphous silicon

Saravanapriyan Sriraman, Sumit Agarwal, Eray S. Aydil et al. · Nature · 2002 · 406 citations

Materials Science, Engineering, Amorphous Silicon +3

Coarse Master Equation from Bayesian Analysis of Replica Molecular Dynamics Simulations

Saravanapriyan Sriraman, Ioannis G. Kevrekidis, Gerhard Hummer · The Journal of Physical Chemistry B · 2005 · 125 citations

Markovian Master Equation, Engineering, Computational Chemistry +16

Atomic layer etching of 3D structures in silicon: Self-limiting and nonideal reactions

Chad M. Huard, Yiting Zhang, Saravanapriyan Sriraman et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2017 · 64 citations

Ar/cl2 Plasmas, Engineering, Electron-beam Lithography +22

Transient behavior in quasi-atomic layer etching of silicon dioxide and silicon nitride in fluorocarbon plasmas

Chad M. Huard, Saravanapriyan Sriraman, Alex Paterson et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2018 · 64 citations

Engineering, Polymer Overlayer, Atomic Layer Etching +22