Saravanapriyan Sriraman

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Publications

Citations

1.8K

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Active since

2001

Affiliations

University of California, Santa Barbara(Current)

Lam Research (United States)

University of Michigan

University of Massachusetts Amherst

National Institutes of Health

Saravanapriyan Sriraman is an author at University of California, Santa Barbara specializing in natural sciences, materials science, and materials engineering.

ORCID

Publications per year

2001–2024

Publications

Overview of atomic layer etching in the semiconductor industry

Keren J. Kanarik, Thorsten Lill, Eric A. Hudson et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2015 · 604 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +15

Mechanism of hydrogen-induced crystallization of amorphous silicon

Saravanapriyan Sriraman, Sumit Agarwal, Eray S. Aydil et al. · Nature · 2002 · 408 citations

Natural Sciences, Materials Engineering, Materials Science +14

Coarse Master Equation from Bayesian Analysis of Replica Molecular Dynamics Simulations

Saravanapriyan Sriraman, Ioannis G. Kevrekidis, Gerhard Hummer · The Journal of Physical Chemistry B · 2005 · 126 citations

Natural Sciences, Chemistry, Physics +17

Transient behavior in quasi-atomic layer etching of silicon dioxide and silicon nitride in fluorocarbon plasmas

Chad M. Huard, Saravanapriyan Sriraman, Alex Paterson et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2018 · 70 citations

Engineering, Materials Engineering, Materials Science +17

Role of neutral transport in aspect ratio dependent plasma etching of three-dimensional features

Chad M. Huard, Yiting Zhang, Saravanapriyan Sriraman et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2017 · 69 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

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