Sumit Agarwal

The 2022 Plasma Roadmap: low temperature plasma science and technology

Igor Adamovich, Sumit Agarwal, Eduardo Ahedo et al. · Journal of Physics D Applied Physics · 2022 · 507 citations · Full text

Natural Sciences, Materials Science, Physics +12

Mechanism of hydrogen-induced crystallization of amorphous silicon

Saravanapriyan Sriraman, Sumit Agarwal, Eray S. Aydil et al. · Nature · 2002 · 408 citations

Natural Sciences, Materials Engineering, Materials Science +14

Atomic layer deposition of silicon-based dielectrics for semiconductor manufacturing: Current status and future outlook

Rafaiel A. Ovanesyan, Ekaterina A. Filatova, Simon D. Elliott et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2019 · 121 citations · Full text

Engineering, Materials Engineering, Materials Science +17

Area-Selective Deposition of Ruthenium by Combining Atomic Layer Deposition and Selective Etching

Martijn F. J. Vos, Sonali N. Chopra, Marcel A. Verheijen et al. · Chemistry of Materials · 2019 · 111 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +13

Surface Reaction Mechanisms during Ozone and Oxygen Plasma Assisted Atomic Layer Deposition of Aluminum Oxide

Vincent Vandalon, Sumit Agarwal · Langmuir · 2010 · 109 citations

Natural Sciences, Chemistry, Materials Science +17