Ekaterina A. Filatova

Atomic layer deposition of silicon-based dielectrics for semiconductor manufacturing: Current status and future outlook

Rafaiel A. Ovanesyan, Ekaterina A. Filatova, Simon D. Elliott et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2019 · 114 citations · Full text

Engineering, Sic Films, Thin Film Process Technology +21

<b>Modeling Mechanism and Growth Reactions for New Nanofabrication Processes by Atomic Layer Deposition</b>

Simon D. Elliott, Gangotri Dey, Yasheng Maimaiti et al. · Advanced Materials · 2015 · 74 citations

Engineering, Material Simulation, Chemistry +22

Understanding the Mechanism of SiC Plasma-Enhanced Chemical Vapor Deposition (PECVD) and Developing Routes toward SiC Atomic Layer Deposition (ALD) with Density Functional Theory

Ekaterina A. Filatova, Dennis M. Hausmann, Simon D. Elliott · ACS Applied Materials & Interfaces · 2018 · 39 citations

Materials Engineering, Materials Science, Engineering +13

Investigating routes toward atomic layer deposition of silicon carbide: <i>Ab initio</i> screening of potential silicon and carbon precursors

Ekaterina A. Filatova, Dennis M. Hausmann, Simon D. Elliott · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2016 · 17 citations

Engineering, Silicon Carbide, Sic Films +19