Concepedia

Author

Shivaji Peddeti

Clarkson University

Also Known As

S. Peddeti, Shivaji Peddeti

7

Publications

337

Citations

7

H-Index

27

Concepts

All Affiliations

Clarkson UniversityMaterials Processing (United States)IMECQatar University
SP

About

Shivaji Peddeti is an author at Clarkson University specializing in engineering, materials science, and materials engineering.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

7

7

337

2

Chemical Engineering

6

6

184

3

Chemistry

5

5

168

4

Applied Physics

3

3

213

5

Electrical Engineering

1

1

153

Shivaji Peddeti

×

7

Publications

337

Citations

7

H-Index

YearCitations

Resistivity dominated by surface scattering in sub-50 nm Cu wires

Rebekah L. Graham, G. B. Alers, Tom Mountsier,

Applied Physics Letters

2010

153

Selective Chemical Mechanical Polishing of Silicon Dioxide over Silicon Nitride for Shallow Trench Isolation Using Ceria Slurries

P. R. Dandu Veera, Shivaji Peddeti, S. V. Babu

Journal of The Electrochemical Society

2009

44

Tartaric Acid as a Complexing Agent for Selective Removal of Tantalum and Copper in CMP

S. V. S. B. Janjam, Shivaji Peddeti, D. Roy,

Electrochemical and Solid-State Letters

2008

42

Chemical Mechanical Polishing of Ge Using Colloidal Silica Particles and H<sub>2</sub>O<sub>2</sub>

Shivaji Peddeti, Patrick Ong, Leonardus H. A. Leunissen,

Electrochemical and Solid-State Letters

2011

29

Chemical Mechanical Polishing of Ge in Hydrogen Peroxide-Based Silica Slurries: Role of Ionic Strength

John B. Matovu, Naresh K. Penta, Shivaji Peddeti,

Journal of The Electrochemical Society

2011

27

Chemical Mechanical Polishing of InP

Shivaji Peddeti, Patrick Ong, Leonardus H. A. Leunissen,

ECS Journal of Solid State Science and Technology

2012

26

Chemical mechanical planarization of germanium shallow trench isolation structures using silica-based dispersions

Shivaji Peddeti, Patrick Ong, Leonardus H. A. Leunissen,

Microelectronic Engineering

2012

16

Page 1