Shivaji Peddeti

Resistivity dominated by surface scattering in sub-50 nm Cu wires

Rebekah L. Graham, G. B. Alers, Tom Mountsier et al. · Applied Physics Letters · 2010 · 153 citations

Materials Science, Surface Characterization, Electrical Engineering +15

Selective Chemical Mechanical Polishing of Silicon Dioxide over Silicon Nitride for Shallow Trench Isolation Using Ceria Slurries

P. R. Dandu Veera, Shivaji Peddeti, S. V. Babu · Journal of The Electrochemical Society · 2009 · 44 citations · Full text

Engineering, Chemistry, Silicon On Insulator +18

Tartaric Acid as a Complexing Agent for Selective Removal of Tantalum and Copper in CMP

S. V. S. B. Janjam, Shivaji Peddeti, D. Roy et al. · Electrochemical and Solid-State Letters · 2008 · 42 citations

Tartaric Acid, Engineering, Chemistry +16

Chemical Mechanical Polishing of Ge Using Colloidal Silica Particles and H₂O₂

Shivaji Peddeti, Patrick Ong, Leonardus H. A. Leunissen et al. · Electrochemical and Solid-State Letters · 2011 · 29 citations

Engineering, Mechanical Engineering, Germanium Hydroxides +21

Chemical Mechanical Polishing of Ge in Hydrogen Peroxide-Based Silica Slurries: Role of Ionic Strength

John B. Matovu, Naresh K. Penta, Shivaji Peddeti et al. · Journal of The Electrochemical Society · 2011 · 27 citations

Ge Removal Rates, Engineering, Mechanical Engineering +22