Concepedia

P. R. Dandu Veera

PR

5

Publications

159

Citations

5

H-Index

2009

Active since

Affiliations

Clarkson University(Current)

Materials Processing (United States)

P. R. Dandu Veera is an author at Clarkson University specializing in chemical engineering, materials engineering, and surface science.

Top concepts

Publications per year

2009–2011

5

Publications

5

Selective Chemical Mechanical Polishing of Silicon Dioxide over Silicon Nitride for Shallow Trench Isolation Using Ceria Slurries

P. R. Dandu Veera, Shivaji Peddeti, S. V. Babu · Journal of The Electrochemical Society · 2009 · 44 citations · Full text

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Role of Poly(diallyldimethylammonium chloride) in Selective Polishing of Polysilicon over Silicon Dioxide and Silicon Nitride Films

Naresh K. Penta, P. R. Dandu Veera, S. V. Babu · Langmuir · 2011 · 33 citations

, , +23

Selective Polishing of Polysilicon during Fabrication of Microelectromechanical Systems Devices

P. R. Dandu Veera, Arun Natarajan, Sharath Hegde et al. · Journal of The Electrochemical Society · 2009 · 30 citations

, , +14

Charge Density and pH Effects on Polycation Adsorption on Poly-Si, SiO<sub>2</sub>, and Si<sub>3</sub>N<sub>4</sub>Films and Impact on Removal During Chemical Mechanical Polishing

Naresh K. Penta, P. R. Dandu Veera, S. V. Babu · ACS Applied Materials & Interfaces · 2011 · 27 citations

Role of polycation adsorption in poly-Si, SiO2 and Si3N4 removal during chemical mechanical polishing: Effect of polishing pad surface chemistry

Naresh K. Penta, John B. Matovu, P. R. Dandu Veera et al. · Colloids and Surfaces A Physicochemical and Engineering Aspects · 2011 · 25 citations

, , +11

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