Concepedia

Sharath Hegde

SH

6

Publications

190

Citations

6

H-Index

2002

Active since

Affiliations

Clarkson University(Current)

Materials Processing (United States)

Sharath Hegde is an author at Clarkson University specializing in chemical engineering, engineering, and materials science.

Top concepts

EngineeringMaterial ScienceChemical EngineeringSurface ScienceSurface PolishingMaterials EngineeringCorrosionMaterial ProcessingMechanical EngineeringMicrostructure

Publications per year

2002–2009

6

Publications

6

Chemical Mechanical Polishing Using Mixed Abrasive Slurries

Anurag Jindal, Sharath Hegde, S. V. Babu · Electrochemical and Solid-State Letters · 2002 · 67 citations

Engineering, Mechanical Engineering, Mineral Processing +16

Chemical Mechanical Polishing of Dielectric Films Using Mixed Abrasive Slurries

Anurag Jindal, Sharath Hegde, S. V. Babu · Journal of The Electrochemical Society · 2003 · 47 citations

Engineering, Polish Rate Selectivity, Mechanical Engineering +16

Selective Polishing of Polysilicon during Fabrication of Microelectromechanical Systems Devices

P. R. Dandu Veera, Arun Natarajan, Sharath Hegde et al. · Journal of The Electrochemical Society · 2009 · 30 citations

Materials Science, Materials Engineering, Chemical Engineering +14

Study of Surface Charge Effects on Oxide and Nitride Planarization Using Alumina/Ceria Mixed Abrasive Slurries

Sharath Hegde, S. V. Babu · Electrochemical and Solid-State Letters · 2004 · 25 citations

Materials Science, Materials Engineering, Chemical Engineering +15

Chemical-mechanical Polishing of Copper Using Molybdenum Dioxide Slurry

Sharath Hegde, Udaya B. Patri, S. V. Babu · Journal of materials research/Pratt's guide to venture capital sources · 2005 · 11 citations

Materials Engineering, Materials Science, Chemical Engineering +8

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