P.K. McLarty

Single-wafer cluster tool performance: an analysis of throughput

T.L. Perkinson, P.K. McLarty, R.S. Gyurcsik et al. · IEEE Transactions on Semiconductor Manufacturing · 1994 · 215 citations

Cluster Computing, Engineering, Cluster Tools +16

Silicon-carbide high-voltage (400 V) Schottky barrier diodes

M. Bhatnagar, P.K. McLarty, B. Jayant Baliga · IEEE Electron Device Letters · 1992 · 182 citations

Semiconductor Technology, Electrical Engineering, Semiconductor Device +9

Modeled tunnel currents for high dielectric constant dielectrics

Eric M. Vogel, Khaled Ahmed, B. Hornung et al. · IEEE Transactions on Electron Devices · 1998 · 163 citations

Device Modeling, Electrical Engineering, Tunnel Currents +13

Single-wafer cluster tool performance: an analysis of the effects of redundant chambers and revisitation sequences on throughput

T.L. Perkinson, R.S. Gyurcsik, P.K. McLarty · IEEE Transactions on Semiconductor Manufacturing · 1996 · 158 citations

Cluster Technology, Cluster Computing, Wafer Scale Processing +15

Electrical characteristics of epitaxial CeO2 on Si(111)

Lee Tye, N. A. El-Masry, Toyohiro Chikyow et al. · Applied Physics Letters · 1994 · 157 citations

Semiconductors, Materials Science, Electrical Engineering +13