Concepedia

T.L. Perkinson

TP

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Publications

2

Citations

375

H-Index

2

Active since

1994

Affiliations

North Carolina State University(Current)

T.L. Perkinson is an author at North Carolina State University specializing in production planning, engineering, and cluster performance modeling.

Publications per year

1994–1996

2

Publications

2

Single-wafer cluster tool performance: an analysis of throughput

T.L. Perkinson, P.K. McLarty, R.S. Gyurcsik et al. · IEEE Transactions on Semiconductor Manufacturing · 1994 · 216 citations

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Single-wafer cluster tool performance: an analysis of the effects of redundant chambers and revisitation sequences on throughput

T.L. Perkinson, R.S. Gyurcsik, P.K. McLarty · IEEE Transactions on Semiconductor Manufacturing · 1996 · 159 citations

, , +11

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