Marcel Lux

Synthesis and Reactivity of Palladium Complexes Featuring a Diphosphinoborane Ligand

Tobias Schindler, Marcel Lux, Marius Peters et al. · Organometallics · 2015 · 67 citations · Full text

Evaluation of Megasonic Cleaning for Sub-90nm Technologies

Guy Vereecke, Frank Holsteyns, Sophia Arnauts et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 2005 · 48 citations

Materials Science, Chemical Engineering, Engineering +15

Removal of Submicrometer Particles from Silicon Wafer Surfaces Using HF-Based Cleaning Mixtures

Rita Vos, Marcel Lux, Kai Xu et al. · Journal of The Electrochemical Society · 2001 · 42 citations · Full text

Materials Science, Submicrometer Particles, Chemical Engineering +12

WS<inf>2</inf> transistors on 300 mm wafers with BEOL compatibility

T. Schram, Quentin Smets, Benjamin Groven et al. · 2017 · 40 citations

Materials Science, Semiconductors, Electrical Engineering +14

Removal of post-etch photoresist and sidewall residues using organic solvent and additive combined with physical forces

Quoc Toan Le, Martine Claes, Thierry Conard et al. · Microelectronic Engineering · 2008 · 35 citations

Self-cleaning Surface, Chemical Engineering, Organic Solvent +13